Library Retrieval System
- xix, 265 p. : ill. ; 24 cm.
- Contents: 1. MEMS: A Technology from Lilliput -- 2. The Sandbox: Materials for MEMS -- 3. The Toolbox: Processes for Micromachining -- 4. The Gearbox: Commercial MEM Structures and Systems -- 5. The New Gearbox: A Peek Into the Future -- 6. The Box: Packaging for MEMS.Includes bibliographical references and index.Summary: "Here's a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describes in detail the materials used in producing MEMS - including silicon, polymers, and glass and quartz substrates - as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications."--BOOK JACKET.